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Articles
Etching of molybdenum via a combination of low-temperature ozone oxidation and wet-chemical oxide dissolution
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Etching of molybdenum via a combination of low-temperature ozone oxidation and wet-chemical oxide dissolution
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Date
2023
Journal article
https://doi.org/10.1116/6.0002404
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pacco, Antoine
;
Nakano, Teppei
;
Iwahata, Shota
;
Iwasaki, Akihisa
;
Altamirano Sanchez, Efrain
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
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2
since deposited on 2023-04-30
Acq. date: 2025-12-15
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1244
since deposited on 2023-04-30
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Acq. date: 2025-12-15
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Downloads
2
since deposited on 2023-04-30
Acq. date: 2025-12-15
Views
1244
since deposited on 2023-04-30
6
last month
1
last week
Acq. date: 2025-12-15
Citations