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Etching of molybdenum via a combination of low-temperature ozone oxidation and wet-chemical oxide dissolution
Publication:
Etching of molybdenum via a combination of low-temperature ozone oxidation and wet-chemical oxide dissolution
Date
2023
Journal article
https://doi.org/10.1116/6.0002404
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pacco, Antoine
;
Nakano, Teppei
;
Iwahata, Shota
;
Iwasaki, Akihisa
;
Altamirano Sanchez, Efrain
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
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since deposited on 2023-04-30
Acq. date: 2025-10-24
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since deposited on 2023-04-30
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Downloads
2
since deposited on 2023-04-30
Acq. date: 2025-10-24
Views
1238
since deposited on 2023-04-30
420
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations