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Etching of molybdenum via a combination of low-temperature ozone oxidation and wet-chemical oxide dissolution
dc.contributor.author | Pacco, Antoine | |
dc.contributor.author | Nakano, Teppei | |
dc.contributor.author | Iwahata, Shota | |
dc.contributor.author | Iwasaki, Akihisa | |
dc.contributor.author | Sanchez, Efrain Altamirano | |
dc.date.accessioned | 2023-04-30T04:07:23Z | |
dc.date.available | 2023-04-30T04:07:23Z | |
dc.date.issued | 2023-MAY | |
dc.identifier.issn | 0734-2101 | |
dc.identifier.other | WOS:000960627700001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41511 | |
dc.source | WOS | |
dc.title | Etching of molybdenum via a combination of low-temperature ozone oxidation and wet-chemical oxide dissolution | |
dc.type | Journal article | |
dc.contributor.imecauthor | Pacco, Antoine | |
dc.contributor.imecauthor | Sanchez, Efrain Altamirano | |
dc.contributor.orcidimec | Pacco, Antoine::0000-0001-6330-5053 | |
dc.identifier.doi | 10.1116/6.0002404 | |
dc.source.numberofpages | 8 | |
dc.source.peerreview | yes | |
dc.source.journal | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | |
dc.source.issue | 3 | |
dc.source.volume | 41 | |
imec.availability | Under review |
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