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Advanced RBS analysis of thin films in micro-electronics

dc.contributor.authorBrijs, Bert
dc.contributor.authorDeleu, Jeroen
dc.contributor.authorHuygebaert, C.
dc.contributor.authorNauwelaerts, Sophie
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorKimura, K.
dc.date.accessioned2021-10-14T12:42:09Z
dc.date.available2021-10-14T12:42:09Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4151
dc.sourceIIOimport
dc.titleAdvanced RBS analysis of thin films in micro-electronics
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conference16th International Conference on the Application of Accelerators in Research and Industry - CAARI; 1-4 November 2000; Denton, TX
dc.source.conferencelocation
imec.availabilityPublished - imec


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