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Gate MOSCAP Studies on Electroless Deposited Nickel Boron as Word Line Candidate Metal for Future Scaled 3-D NAND Flash
dc.contributor.author | Ramesh, S. | |
dc.contributor.author | Rachidi, S. | |
dc.contributor.author | Donadio, G. L. | |
dc.contributor.author | van den Bosch, G. | |
dc.contributor.author | Rosmeulen, M. | |
dc.date.accessioned | 2023-05-04T19:59:26Z | |
dc.date.available | 2023-05-04T19:59:26Z | |
dc.date.issued | 2023-APR 1 | |
dc.identifier.issn | 2162-8769 | |
dc.identifier.other | WOS:000973371600001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41565 | |
dc.source | WOS | |
dc.title | Gate MOSCAP Studies on Electroless Deposited Nickel Boron as Word Line Candidate Metal for Future Scaled 3-D NAND Flash | |
dc.type | Journal article | |
dc.contributor.imecauthor | Ramesh, S. | |
dc.contributor.imecauthor | Rachidi, S. | |
dc.contributor.imecauthor | Donadio, G. L. | |
dc.contributor.imecauthor | van den Bosch, G. | |
dc.contributor.imecauthor | Rosmeulen, M. | |
dc.identifier.doi | 10.1149/2162-8777/accb66 | |
dc.source.numberofpages | 7 | |
dc.source.peerreview | yes | |
dc.source.journal | ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY | |
dc.source.issue | 4 | |
dc.source.volume | 12 | |
imec.availability | Under review |
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