dc.contributor.author | Lorusso, Gian | |
dc.contributor.author | De Simone, Danilo | |
dc.contributor.author | Zidan, Mohamed | |
dc.contributor.author | Severi, Joren | |
dc.contributor.author | Moussa, Alain | |
dc.contributor.author | Dey, Bappaditya | |
dc.contributor.author | Halder, Sandip | |
dc.contributor.author | Goldenshtein, Alex | |
dc.contributor.author | Houchens, Kevin | |
dc.contributor.author | Santoro, Gaetano | |
dc.contributor.author | Fischer, Daniel | |
dc.contributor.author | Muellender, Angelika | |
dc.contributor.author | Mack, Chris | |
dc.contributor.author | Kondo, Tsuyoshi | |
dc.contributor.author | Shohjoh, Tomoyasu | |
dc.contributor.author | Ikota, Masami | |
dc.contributor.author | Charley, Anne-Laure | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Leray, Philippe | |
dc.date.accessioned | 2023-07-10T14:11:45Z | |
dc.date.available | 2023-05-07T20:59:45Z | |
dc.date.available | 2023-07-10T14:11:45Z | |
dc.date.issued | 2023 | |
dc.identifier.issn | 0021-4922 | |
dc.identifier.other | WOS:000971709300001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41574.2 | |
dc.source | WOS | |
dc.title | e-beam metrology of thin resist for high NA EUVL | |
dc.type | Journal article review | |
dc.contributor.imecauthor | Lorusso, Gian | |
dc.contributor.imecauthor | De Simone, Danilo | |
dc.contributor.imecauthor | Zidan, Mohamed | |
dc.contributor.imecauthor | Severi, Joren | |
dc.contributor.imecauthor | Moussa, Alain | |
dc.contributor.imecauthor | Dey, Bappaditya | |
dc.contributor.imecauthor | Halder, Sandip | |
dc.contributor.imecauthor | Charley, Anne-Laure | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.imecauthor | Leray, Philippe | |
dc.contributor.orcidimec | De Simone, Danilo::0000-0003-3927-5207 | |
dc.contributor.orcidimec | Moussa, Alain::0000-0002-6377-4199 | |
dc.contributor.orcidimec | Dey, Bappaditya::0000-0002-0886-137X | |
dc.contributor.orcidimec | Halder, Sandip::0000-0002-6314-2685 | |
dc.contributor.orcidimec | Charley, Anne-Laure::0000-0003-4745-0167 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.contributor.orcidimec | Leray, Philippe::0000-0002-1086-270X | |
dc.date.embargo | 9999-12-31 | |
dc.identifier.doi | 10.35848/1347-4065/acc3a4 | |
dc.source.numberofpages | 9 | |
dc.source.peerreview | yes | |
dc.source.beginpage | Art. SG0808 | |
dc.source.endpage | na | |
dc.source.journal | JAPANESE JOURNAL OF APPLIED PHYSICS | |
dc.source.issue | SG | |
dc.source.volume | 62 | |
imec.availability | Published - imec | |