Publication:

e-beam metrology of thin resist for high NA EUVL

Date

2023

Journal Article Review

https://doi.org/10.35848/1347-4065/acc3a4

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Published version 2.04 MB

Author(s)

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De Simone, Danilo

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Dey, Bappaditya

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Goldenshtein, Alex

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Houchens, Kevin

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Santoro, Gaetano

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Fischer, Daniel

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Muellender, Angelika

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Kondo, Tsuyoshi

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Shohjoh, Tomoyasu

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Charley, Anne-Laure

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De Gendt, Stefan

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Leray, Philippe

Journal

JAPANESE JOURNAL OF APPLIED PHYSICS

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1257 since deposited on 2023-05-07

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Acq. date: 2026-02-25