dc.contributor.author | Porret, Clément | |
dc.contributor.author | Everaert, Jean-Luc | |
dc.contributor.author | Schaekers, Marc | |
dc.contributor.author | Ragnarsson, Lars-Ake | |
dc.contributor.author | Hikavyy, Andriy | |
dc.contributor.author | Rosseel, Erik | |
dc.contributor.author | Rengo, Gianluca | |
dc.contributor.author | Loo, Roger | |
dc.contributor.author | Khazaka, R. | |
dc.contributor.author | Givens, M. | |
dc.contributor.author | Piao, Xiaoyu | |
dc.contributor.author | Mertens, Sofie | |
dc.contributor.author | Heylen, Nancy | |
dc.contributor.author | Mertens, Hans | |
dc.contributor.author | Toledo de Carvalho Cavalcante, Camila | |
dc.contributor.author | Sterckx, Gunther | |
dc.contributor.author | Brus, Stephan | |
dc.contributor.author | Nalin Mehta, Ankit | |
dc.contributor.author | Korytov, Maxim | |
dc.contributor.author | Batuk, Dmitry | |
dc.contributor.author | Favia, Paola | |
dc.contributor.author | Langer, Robert | |
dc.contributor.author | Pourtois, Geoffrey | |
dc.contributor.author | Swerts, Johan | |
dc.contributor.author | Dentoni Litta, Eugenio | |
dc.contributor.author | Horiguchi, Naoto | |
dc.date.accessioned | 2023-06-01T14:45:05Z | |
dc.date.available | 2023-05-25T20:20:01Z | |
dc.date.available | 2023-06-01T14:45:05Z | |
dc.date.issued | 2022 | |
dc.identifier.issn | 2380-9248 | |
dc.identifier.other | WOS:000968800700157 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41621.2 | |
dc.source | WOS | |
dc.title | Low temperature source / drain epitaxy and functional silicides: essentials for ultimate contact scaling | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Porret, Clément | |
dc.contributor.imecauthor | Everaert, Jean-Luc | |
dc.contributor.imecauthor | Schaekers, Marc | |
dc.contributor.imecauthor | Ragnarsson, Lars-Ake | |
dc.contributor.imecauthor | Hikavyy, Andriy | |
dc.contributor.imecauthor | Rosseel, Erik | |
dc.contributor.imecauthor | Rengo, Gianluca | |
dc.contributor.imecauthor | Loo, Roger | |
dc.contributor.imecauthor | Piao, Xiaoyu | |
dc.contributor.imecauthor | Mertens, Sofie | |
dc.contributor.imecauthor | Heylen, Nancy | |
dc.contributor.imecauthor | Mertens, Hans | |
dc.contributor.imecauthor | Toledo de Carvalho Cavalcante, Camila | |
dc.contributor.imecauthor | Sterckx, Gunther | |
dc.contributor.imecauthor | Brus, Stephan | |
dc.contributor.imecauthor | Nalin Mehta, Ankit | |
dc.contributor.imecauthor | Korytov, Maxim | |
dc.contributor.imecauthor | Batuk, Dmitry | |
dc.contributor.imecauthor | Favia, Paola | |
dc.contributor.imecauthor | Langer, Robert | |
dc.contributor.imecauthor | Pourtois, Geoffrey | |
dc.contributor.imecauthor | Swerts, Johan | |
dc.contributor.imecauthor | Dentoni Litta, Eugenio | |
dc.contributor.imecauthor | Horiguchi, Naoto | |
dc.contributor.orcidimec | Porret, Clément::0000-0002-4561-348X | |
dc.contributor.orcidimec | Everaert, Jean-Luc::0000-0002-0660-9090 | |
dc.contributor.orcidimec | Schaekers, Marc::0000-0002-1496-7816 | |
dc.contributor.orcidimec | Ragnarsson, Lars-Ake::0000-0003-1057-8140 | |
dc.contributor.orcidimec | Hikavyy, Andriy::0000-0002-8201-075X | |
dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
dc.contributor.orcidimec | Mertens, Sofie::0000-0002-1482-6730 | |
dc.contributor.orcidimec | Brus, Stephan::0000-0003-3554-0640 | |
dc.contributor.orcidimec | Nalin Mehta, Ankit::0000-0002-2169-940X | |
dc.contributor.orcidimec | Batuk, Dmitry::0000-0002-6384-6690 | |
dc.contributor.orcidimec | Favia, Paola::0000-0002-1019-3497 | |
dc.contributor.orcidimec | Langer, Robert::0000-0002-1132-3468 | |
dc.contributor.orcidimec | Pourtois, Geoffrey::0000-0003-2597-8534 | |
dc.contributor.orcidimec | Dentoni Litta, Eugenio::0000-0003-0333-376X | |
dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
dc.contributor.orcidimec | Rengo, Gianluca::0000-0002-3410-6466 | |
dc.contributor.orcidimec | Piao, Xiaoyu::0000-0002-2204-9636 | |
dc.contributor.orcidimec | Heylen, Nancy::0009-0008-0490-0993 | |
dc.contributor.orcidimec | Mertens, Hans::0000-0002-3392-6892 | |
dc.contributor.orcidimec | Toledo de Carvalho Cavalcante, Camila::0009-0009-8055-5703 | |
dc.contributor.orcidimec | Korytov, Maxim::0009-0001-9313-7019 | |
dc.contributor.orcidimec | Swerts, Johan::0000-0001-7547-7194 | |
dc.identifier.doi | 10.1109/IEDM45625.2022.10019501 | |
dc.identifier.eisbn | 978-1-6654-8959-1 | |
dc.source.numberofpages | 4 | |
dc.source.peerreview | yes | |
dc.source.conference | International Electron Devices Meeting (IEDM) | |
dc.source.conferencedate | DEC 03-07, 2022 | |
dc.source.conferencelocation | San Francisco | |
dc.source.journal | na | |
imec.availability | Published - imec | |
dc.description.wosFundingText | The imec core program members, the European Commission, local authorities, the imec pilot line, the imec material characterization and analysis group, ASM and Air Liquide Advanced Materials are acknowledged for their support. This project received funding from the ECSEL Joint Undertaking (JU) under grant agreement No 875999. The JU receives support from the European Union's Horizon 2020 research and innovation programme and Netherlands, Belgium, Germany, France, Austria, Hungary, United Kingdom, Romania, Israel. | |