A fundamental multitechnique of SIMS depth profiling
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Brijs, Bert | |
dc.contributor.author | Bender, Hugo | |
dc.contributor.author | Alay, Josep Lluis | |
dc.contributor.author | De Coster, Walter | |
dc.date.accessioned | 2021-09-29T12:50:52Z | |
dc.date.available | 2021-09-29T12:50:52Z | |
dc.date.issued | 1994 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/417 | |
dc.source | IIOimport | |
dc.title | A fundamental multitechnique of SIMS depth profiling | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.imecauthor | Bender, Hugo | |
dc.source.peerreview | no | |
dc.source.beginpage | I10 | |
dc.source.conference | Quantitative Surface Analysis Conference - QSA. 8th International Conference | |
dc.source.conferencedate | 23/08/1994 | |
dc.source.conferencelocation | Guildford UK | |
imec.availability | Published - imec |
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