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PZT based actuator for an efficient electro-optomechanical interaction in Si-photonic integrated circuits

dc.contributor.authorAnsari, Irfan
dc.contributor.authorFeutmba, Gilles F.
dc.contributor.authorDieussaert, Emiel
dc.contributor.authorGeorge, John P.
dc.contributor.authorBeeckman, Jeroen
dc.contributor.authorVan Thourhout, Dries
dc.date.accessioned2023-08-24T09:41:18Z
dc.date.available2023-06-20T10:33:21Z
dc.date.available2023-08-24T09:41:18Z
dc.date.issued2022
dc.identifier.isbn978-1-5106-4879-1
dc.identifier.issn0277-786X
dc.identifier.otherWOS:000836324200036
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41806.2
dc.sourceWOS
dc.titlePZT based actuator for an efficient electro-optomechanical interaction in Si-photonic integrated circuits
dc.typeProceedings paper
dc.contributor.imecauthorAnsari, Irfan
dc.contributor.imecauthorFeutmba, Gilles F.
dc.contributor.imecauthorDieussaert, Emiel
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidextGeorge, John P.::0000-0002-8499-9602
dc.contributor.orcidextBeeckman, Jeroen::0000-0002-0711-2465
dc.contributor.orcidimecFeutmba, Gilles F.::0000-0001-8648-5819
dc.contributor.orcidimecDieussaert, Emiel::0000-0003-2732-7751
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.date.embargo2022-03-05
dc.identifier.doi10.1117/12.2610629
dc.identifier.eisbn978-1-5106-4880-7
dc.source.numberofpages4
dc.source.peerreviewyes
dc.source.beginpageArt. 1200411
dc.source.conferenceConference on Integrated Optics - Devices, Materials, and Technologies XXVI at SPIE OPTO Conference
dc.source.conferencedateJAN 22-FEB 28, 2022
dc.source.conferencelocationSan Francisco
dc.source.journalProceedings of SPIE
dc.source.volume12004
imec.availabilityPublished - open access
dc.description.wosFundingTextThis work was supported by the EU commission through Grant agreement No. 732894 (FET proactive HOT) and through the UGent grant BOFGOA2020000103. Gilles F. Feutmba acknowledges support and funding as an SB-PhD Fellow of the research foundation{Flanders (FWO, grant number 1S68218N).


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220.500.12860/41806.2*2023-08-24T09:38:06Zvalidation by library/open access desk
120.500.12860/418062023-06-20T10:33:21Z

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