EISBN
978-1-5106-4880-7
ISBN
978-1-5106-4879-1
ISSN
0277-786X
Conference
Conference on Integrated Optics - Devices, Materials, and Technologies XXVI at SPIE OPTO Conference
Journal
Proceedings of SPIE
Volume
12004
Title
PZT based actuator for an efficient electro-optomechanical interaction in Si-photonic integrated circuits
Publication type
Proceedings paper
Embargo date
2022-03-05