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PZT based actuator for an efficient electro-optomechanical interaction in Si-photonic integrated circuits
dc.contributor.author | Ansari, Irfan | |
dc.contributor.author | Feutmba, Gilles F. | |
dc.contributor.author | Dieussaert, Emiel | |
dc.contributor.author | George, John P. | |
dc.contributor.author | Beeckman, Jeroen | |
dc.contributor.author | Van Thourhout, Dries | |
dc.date.accessioned | 2023-06-20T10:33:21Z | |
dc.date.available | 2023-06-20T10:33:21Z | |
dc.date.issued | 2022 | |
dc.identifier.isbn | 978-1-5106-4879-1 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:000836324200036 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41806 | |
dc.source | WOS | |
dc.title | PZT based actuator for an efficient electro-optomechanical interaction in Si-photonic integrated circuits | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Ansari, Irfan | |
dc.contributor.imecauthor | Feutmba, Gilles F. | |
dc.contributor.imecauthor | Dieussaert, Emiel | |
dc.contributor.imecauthor | Van Thourhout, Dries | |
dc.contributor.orcidext | George, John P.::0000-0002-8499-9602 | |
dc.contributor.orcidext | Beeckman, Jeroen::0000-0002-0711-2465 | |
dc.contributor.orcidimec | Feutmba, Gilles F.::0000-0001-8648-5819 | |
dc.contributor.orcidimec | Dieussaert, Emiel::0000-0003-2732-7751 | |
dc.contributor.orcidimec | Van Thourhout, Dries::0000-0003-0111-431X | |
dc.identifier.doi | 10.1117/12.2610629 | |
dc.identifier.eisbn | 978-1-5106-4880-7 | |
dc.source.numberofpages | 4 | |
dc.source.peerreview | yes | |
dc.source.conference | Conference on Integrated Optics - Devices, Materials, and Technologies XXVI at SPIE OPTO Conference | |
dc.source.conferencedate | JAN 22-FEB 28, 2022 | |
dc.source.volume | 12004 | |
imec.availability | Under review |