dc.contributor.author | Ramesh, Siva | |
dc.contributor.author | Ajaykumar, Arjun | |
dc.contributor.author | Ragnarsson, Lars-Ake | |
dc.contributor.author | Breuil, Laurent | |
dc.contributor.author | El Hajjam, Gabriel Khalil | |
dc.contributor.author | Kaczer, Ben | |
dc.contributor.author | Belmonte, Attilio | |
dc.contributor.author | Nyns, Laura | |
dc.contributor.author | Soulie, Jean-Philippe | |
dc.contributor.author | van den Bosch, Geert | |
dc.contributor.author | Rosmeulen, Maarten | |
dc.date.accessioned | 2023-08-04T07:55:30Z | |
dc.date.available | 2023-06-20T10:37:17Z | |
dc.date.available | 2023-08-04T07:55:30Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | 2072-666X | |
dc.identifier.other | WOS:000699976100001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41972.2 | |
dc.source | WOS | |
dc.title | Understanding the Origin of Metal Gate Work Function Shift and Its Impact on Erase Performance in 3D NAND Flash Memories | |
dc.type | Journal article | |
dc.contributor.imecauthor | Ramesh, Siva | |
dc.contributor.imecauthor | Ajaykumar, Arjun | |
dc.contributor.imecauthor | Ragnarsson, Lars-Ake | |
dc.contributor.imecauthor | Breuil, Laurent | |
dc.contributor.imecauthor | El Hajjam, Gabriel Khalil | |
dc.contributor.imecauthor | Kaczer, Ben | |
dc.contributor.imecauthor | Belmonte, Attilio | |
dc.contributor.imecauthor | Nyns, Laura | |
dc.contributor.imecauthor | Soulie, Jean-Philippe | |
dc.contributor.imecauthor | van den Bosch, Geert | |
dc.contributor.imecauthor | Rosmeulen, Maarten | |
dc.contributor.orcidimec | Kaczer, Ben::0000-0002-1484-4007 | |
dc.contributor.orcidimec | Belmonte, Attilio::0000-0002-3947-1948 | |
dc.contributor.orcidimec | van den Bosch, Geert::0000-0001-9971-6954 | |
dc.contributor.orcidimec | Ragnarsson, Lars-Ake::0000-0003-1057-8140 | |
dc.contributor.orcidimec | Breuil, Laurent::0000-0003-2869-1651 | |
dc.contributor.orcidimec | Nyns, Laura::0000-0001-8220-870X | |
dc.contributor.orcidimec | Soulie, Jean-Philippe::0000-0002-5956-6485 | |
dc.contributor.orcidimec | Van den Bosch, Geert::0000-0001-9971-6954 | |
dc.contributor.orcidimec | Rosmeulen, Maarten::0000-0002-3663-7439 | |
dc.contributor.orcidimec | Ramesh, Siva::0000-0002-8473-7258 | |
dc.date.embargo | 2021-09-08 | |
dc.identifier.doi | 10.3390/mi12091084 | |
dc.source.numberofpages | 15 | |
dc.source.peerreview | yes | |
dc.source.beginpage | Art. 1084 | |
dc.source.endpage | na | |
dc.source.journal | MICROMACHINES | |
dc.identifier.pmid | MEDLINE:34577727 | |
dc.source.issue | 9 | |
dc.source.volume | 12 | |
imec.availability | Published - open access | |