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Understanding the Origin of Metal Gate Work Function Shift and Its Impact on Erase Performance in 3D NAND Flash Memories
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Authors
Ramesh, Siva
;
Ajaykumar, Arjun
;
Ragnarsson, Lars-Ake
;
Breuil, Laurent
;
El Hajjam, Gabriel Khalil
;
Kaczer, Ben
;
Belmonte, Attilio
;
Nyns, Laura
;
Soulie, Jean-Philippe
;
van den Bosch, Geert
;
Rosmeulen, Maarten
DOI
10.3390/mi12091084
ISSN
2072-666X
PMID
MEDLINE:34577727
Issue
9
Journal
MICROMACHINES
Volume
12
Title
Understanding the Origin of Metal Gate Work Function Shift and Its Impact on Erase Performance in 3D NAND Flash Memories
Publication type
Journal article
Embargo date
2021-09-08
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2
20.500.12860/41972.2
*
2023-08-04T07:27:27Z
validation by library/open access desk
1
20.500.12860/41972
2023-06-20T10:37:17Z
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