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Understanding the Origin of Metal Gate Work Function Shift and Its Impact on Erase Performance in 3D NAND Flash Memories

dc.contributor.authorRamesh, Sivaramakrishnan
dc.contributor.authorAjaykumar, Arjun
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorBreuil, Laurent
dc.contributor.authorEl Hajjam, Gabriel Khalil
dc.contributor.authorKaczer, Ben
dc.contributor.authorBelmonte, Attilio
dc.contributor.authorNyns, Laura
dc.contributor.authorSoulie, Jean-Philippe
dc.contributor.authorvan den Bosch, Geert
dc.contributor.authorRosmeulen, Maarten
dc.date.accessioned2023-06-20T10:37:17Z
dc.date.available2023-06-20T10:37:17Z
dc.date.issued2021-SEP
dc.identifier.otherWOS:000699976100001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41972
dc.sourceWOS
dc.titleUnderstanding the Origin of Metal Gate Work Function Shift and Its Impact on Erase Performance in 3D NAND Flash Memories
dc.typeJournal article
dc.contributor.imecauthorRamesh, Sivaramakrishnan
dc.contributor.imecauthorAjaykumar, Arjun
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorBreuil, Laurent
dc.contributor.imecauthorEl Hajjam, Gabriel Khalil
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorBelmonte, Attilio
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorSoulie, Jean-Philippe
dc.contributor.imecauthorvan den Bosch, Geert
dc.contributor.imecauthorRosmeulen, Maarten
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecBelmonte, Attilio::0000-0002-3947-1948
dc.contributor.orcidimecvan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecBreuil, Laurent::0000-0003-2869-1651
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimecSoulie, Jean-Philippe::0000-0002-5956-6485
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecRosmeulen, Maarten::0000-0002-3663-7439
dc.identifier.doi10.3390/mi12091084
dc.source.numberofpages15
dc.source.peerreviewyes
dc.source.journalMICROMACHINES
dc.identifier.pmidMEDLINE:34577727
dc.source.issue9
dc.source.volume12
imec.availabilityUnder review


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220.500.12860/41972.22023-08-04T07:27:27Zvalidation by library/open access desk
120.500.12860/41972*2023-06-20T10:37:17Z

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