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Towards sub-10nm carrier profiling with spreading resistance techniques

dc.contributor.authorClarysse, Trudo
dc.contributor.authorEyben, Pierre
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-14T12:44:30Z
dc.date.available2021-10-14T12:44:30Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4200
dc.sourceIIOimport
dc.titleTowards sub-10nm carrier profiling with spreading resistance techniques
dc.typeOral presentation
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceInternational Conference on Electronic Materials & European Materials Research Society Spring Meeting. Symposium M: Advanced Cha
dc.source.conferencelocation
imec.availabilityPublished - imec


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