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Apparent size effects on dopant activation in nanometer-wide Si fins
dc.contributor.author | Folkersma, Steven | |
dc.contributor.author | Bogdanowicz, Janusz | |
dc.contributor.author | Favia, Paola | |
dc.contributor.author | Wouters, Lennaert | |
dc.contributor.author | Petersen, Dirch Hjorth | |
dc.contributor.author | Hansen, Ole | |
dc.contributor.author | Henrichsen, Henrik Hartmann | |
dc.contributor.author | Nielsen, Peter Former | |
dc.contributor.author | Shiv, Lior | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2023-06-20T10:38:51Z | |
dc.date.available | 2023-06-20T10:38:51Z | |
dc.date.issued | 2021-MAR | |
dc.identifier.issn | 2166-2746 | |
dc.identifier.other | WOS:000631877800001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42019 | |
dc.source | WOS | |
dc.title | Apparent size effects on dopant activation in nanometer-wide Si fins | |
dc.type | Journal article | |
dc.contributor.imecauthor | Folkersma, Steven | |
dc.contributor.imecauthor | Bogdanowicz, Janusz | |
dc.contributor.imecauthor | Favia, Paola | |
dc.contributor.imecauthor | Wouters, Lennaert | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.orcidext | Petersen, Dirch Hjorth::0000-0002-9309-4186 | |
dc.contributor.orcidext | Hansen, Ole::0000-0002-6090-8323 | |
dc.contributor.orcidimec | Favia, Paola::0000-0002-1019-3497 | |
dc.contributor.orcidimec | Vandervorst, Wilfried::0000-0001-6218-6291 | |
dc.contributor.orcidimec | Bogdanowicz, Janusz::0000-0002-7503-8922 | |
dc.contributor.orcidimec | Wouters, Lennaert::0000-0002-6730-9542 | |
dc.identifier.doi | 10.1116/6.0000921 | |
dc.source.numberofpages | 5 | |
dc.source.peerreview | yes | |
dc.source.journal | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | |
dc.source.issue | 2 | |
dc.source.volume | 39 | |
imec.availability | Under review |