Publication:

Apparent size effects on dopant activation in nanometer-wide Si fins

Date

2021
Journal article
https://doi.org/10.1116/6.0000921
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Author(s)

Folkersma, Steven  
;
Bogdanowicz, Janusz  
;
Favia, Paola  
;
Wouters, Lennaert  
;
Petersen, Dirch Hjorth
;
Hansen, Ole
;
Henrichsen, Henrik Hartmann
;
Nielsen, Peter Former
;
Shiv, Lior
;
Vandervorst, Wilfried  

Journal

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

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