Publication:

Apparent size effects on dopant activation in nanometer-wide Si fins

Date

2021
Journal article
https://doi.org/10.1116/6.0000921
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dc.contributor.authorFolkersma, Steven
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorFavia, Paola
dc.contributor.authorWouters, Lennaert
dc.contributor.authorPetersen, Dirch Hjorth
dc.contributor.authorHansen, Ole
dc.contributor.authorHenrichsen, Henrik Hartmann
dc.contributor.authorNielsen, Peter Former
dc.contributor.authorShiv, Lior
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorFolkersma, Steven
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorWouters, Lennaert
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidextPetersen, Dirch Hjorth::0000-0002-9309-4186
dc.contributor.orcidextHansen, Ole::0000-0002-6090-8323
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecVandervorst, Wilfried::0000-0001-6218-6291
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecWouters, Lennaert::0000-0002-6730-9542
dc.date.accessioned2023-08-09T08:17:19Z
dc.date.available2023-06-20T10:38:51Z
dc.date.available2023-06-22T06:12:12Z
dc.date.available2023-08-09T08:17:19Z
dc.date.embargo2022-03-23
dc.date.issued2021
dc.identifier.doi10.1116/6.0000921
dc.identifier.issn2166-2746
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42019
dc.publisherA V S AMER INST PHYSICS
dc.source.beginpageArt. 023202
dc.source.endpagena
dc.source.issue2
dc.source.journalJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
dc.source.numberofpages5
dc.source.volume39
dc.title

Apparent size effects on dopant activation in nanometer-wide Si fins

dc.typeJournal article
dspace.entity.typePublication
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