Apparent size effects on dopant activation in nanometer-wide Si fins

Folkersma, Steven; Bogdanowicz, Janusz; Favia, Paola; Wouters, Lennaert; Petersen, Dirch Hjorth; Hansen, Ole; Henrichsen, Henrik Hartmann; Nielsen, Peter Former; Shiv, Lior; Vandervorst, Wilfried

doi:10.1116/6.0000921

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Apparent size effects on dopant activation in nanometer-wide Si fins

Date

2021

Journal article

https://doi.org/10.1116/6.0000921

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Petersen, Dirch Hjorth

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Hansen, Ole

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Henrichsen, Henrik Hartmann

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Nielsen, Peter Former

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Shiv, Lior

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Vandervorst, Wilfried

Journal

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

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Acq. date: 2026-08-14

1156 since deposited on 2023-06-20

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Apparent size effects on dopant activation in nanometer-wide Si fins

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