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Electrical characterization of ultrashallow dopant profiles

dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorCollart, E. J. H.
dc.contributor.authorMurrell, A. J.
dc.date.accessioned2021-10-14T12:44:38Z
dc.date.available2021-10-14T12:44:38Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4202
dc.sourceIIOimport
dc.titleElectrical characterization of ultrashallow dopant profiles
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage3569
dc.source.endpage3574
dc.source.journalJournal of the Electrochemical Society
dc.source.issue9
dc.source.volume147
imec.availabilityPublished - open access


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