Electrical characterization of ultrashallow dopant profiles

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Authors

Clarysse, Trudo; Vandervorst, Wilfried; Collart, E. J. H.; Murrell, A. J.

Issue

9

Journal

Journal of the Electrochemical Society

Volume

147

Title

Electrical characterization of ultrashallow dopant profiles

Publication type

Journal article

Embargo date

9999-12-31

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