Publication:
Electrical characterization of ultrashallow dopant profiles
Date
| dc.contributor.author | Clarysse, Trudo | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Collart, E. J. H. | |
| dc.contributor.author | Murrell, A. J. | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-14T12:44:38Z | |
| dc.date.available | 2021-10-14T12:44:38Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4202 | |
| dc.source.beginpage | 3569 | |
| dc.source.endpage | 3574 | |
| dc.source.issue | 9 | |
| dc.source.journal | Journal of the Electrochemical Society | |
| dc.source.volume | 147 | |
| dc.title | Electrical characterization of ultrashallow dopant profiles | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |