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Scaling-friendly approaches to minimize the magnitude and asymmetry of wafer warpage during 3-D NAND fabrication
dc.contributor.author | Okudur, Oguzhan Orkut | |
dc.contributor.author | Gonzalez, Mario | |
dc.contributor.author | Van den Bosch, Geert | |
dc.contributor.author | Rosmeulen, Maarten | |
dc.date.accessioned | 2023-06-25T20:34:40Z | |
dc.date.available | 2023-06-25T20:34:40Z | |
dc.date.issued | 2023-JUN | |
dc.identifier.issn | 0026-2714 | |
dc.identifier.other | WOS:000992605100001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42086 | |
dc.source | WOS | |
dc.title | Scaling-friendly approaches to minimize the magnitude and asymmetry of wafer warpage during 3-D NAND fabrication | |
dc.type | Journal article | |
dc.contributor.imecauthor | Okudur, Oguzhan Orkut | |
dc.contributor.imecauthor | Gonzalez, Mario | |
dc.contributor.imecauthor | Van den Bosch, Geert | |
dc.contributor.imecauthor | Rosmeulen, Maarten | |
dc.contributor.orcidimec | Okudur, Oguzhan Orkut::0000-0002-4790-7772 | |
dc.contributor.orcidimec | Gonzalez, Mario::0000-0003-4374-4854 | |
dc.contributor.orcidimec | Van den Bosch, Geert::0000-0001-9971-6954 | |
dc.contributor.orcidimec | Rosmeulen, Maarten::0000-0002-3663-7439 | |
dc.identifier.doi | 10.1016/j.microrel.2023.114996 | |
dc.source.numberofpages | 9 | |
dc.source.peerreview | yes | |
dc.source.journal | MICROELECTRONICS RELIABILITY | |
dc.source.volume | 145 | |
imec.availability | Under review |
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