Authors

Conard, Thierry; Kenens, Conny; De Gendt, Stefan; Claes, Martine; Lagrange, Sébastien; WorthA, W.; Jassal, S.; Vandervorst, Wilfried

Conference

Secondary Ion Mass Spectrometry - SIMS XII. Proceedings of the 12th International Conference

Title

TOFSIMS evaluation of the removal of resists on silicon by ozone-based cleaning

Publication type

Proceedings paper

Embargo date

9999-12-31