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Two-dimensional spreading resistance profiling: recent understandings and applications

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorPrivitera, Vittorio
dc.contributor.authorRaineri, Vito
dc.contributor.authorClarysse, Trudo
dc.contributor.authorPawlik, M.
dc.date.accessioned2021-09-29T12:51:04Z
dc.date.available2021-09-29T12:51:04Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/421
dc.sourceIIOimport
dc.titleTwo-dimensional spreading resistance profiling: recent understandings and applications
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage276
dc.source.endpage282
dc.source.journalJ. Vac. Sci. Technol. B
dc.source.issue1
dc.source.volume12
imec.availabilityPublished - imec
imec.internalnotesPapers from the 2nd International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors. Research Triangle Park, USA. March 23-25, 1993.


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