Two-dimensional spreading resistance profiling: recent understandings and applications

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Authors

Vandervorst, Wilfried; Privitera, Vittorio; Raineri, Vito; Clarysse, Trudo; Pawlik, M.

Issue

1

Journal

J. Vac. Sci. Technol. B

Volume

12

Title

Two-dimensional spreading resistance profiling: recent understandings and applications

Publication type

Journal article

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