Publication:
Two-dimensional spreading resistance profiling: recent understandings and applications
Date
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Privitera, Vittorio | |
| dc.contributor.author | Raineri, Vito | |
| dc.contributor.author | Clarysse, Trudo | |
| dc.contributor.author | Pawlik, M. | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-09-29T12:51:04Z | |
| dc.date.available | 2021-09-29T12:51:04Z | |
| dc.date.issued | 1994 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/421 | |
| dc.source.beginpage | 276 | |
| dc.source.endpage | 282 | |
| dc.source.issue | 1 | |
| dc.source.journal | J. Vac. Sci. Technol. B | |
| dc.source.volume | 12 | |
| dc.title | Two-dimensional spreading resistance profiling: recent understandings and applications | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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