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Alignment and overlay through opaque metal layers

dc.contributor.authorBlanco, Victor
dc.contributor.authorCanga, Eren
dc.contributor.authorJehoul, Christiane
dc.contributor.authorMoussa, Alain
dc.contributor.authorTamaddon, Amir-Hossein
dc.contributor.authorTabery, C.
dc.contributor.authorGunjala, G.
dc.contributor.authorMenchtchikov, B.
dc.contributor.authorZacca, V. G.
dc.contributor.authorLalbahadoersing, S.
dc.contributor.authorden Boef, A.
dc.contributor.authorSynowicky, R.
dc.date.accessioned2024-03-28T08:31:59Z
dc.date.available2023-07-28T17:39:55Z
dc.date.available2024-03-28T08:31:59Z
dc.date.issued2023
dc.identifier.isbn978-1-5106-6099-1
dc.identifier.issn0277-786X
dc.identifier.otherWOS:001022962000013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42231.2
dc.sourceWOS
dc.titleAlignment and overlay through opaque metal layers
dc.typeProceedings paper
dc.contributor.imecauthorBlanco, Victor
dc.contributor.imecauthorCanga, Eren
dc.contributor.imecauthorJehoul, Christiane
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorTamaddon, Amir-Hossein
dc.contributor.orcidimecBlanco, Victor::0000-0003-4308-0381
dc.contributor.orcidimecCanga, Eren::0000-0002-2322-8070
dc.contributor.orcidimecMoussa, Alain::0000-0002-6377-4199
dc.contributor.orcidimecTamaddon, Amir-Hossein::0000-0003-4566-0697
dc.identifier.doi10.1117/12.2658084
dc.identifier.eisbn978-1-5106-6100-4
dc.source.numberofpages17
dc.source.peerreviewyes
dc.source.beginpageArt. 124960I
dc.source.conferenceConference on Metrology, Inspection, and Process Control XXXVII
dc.source.conferencedateFEB 27-MAR 02, 2023
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.volume12496
imec.availabilityPublished - imec


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220.500.12860/42231.2*2024-03-28T08:27:46Zvalidation by library/open access desk
120.500.12860/422312023-07-28T17:39:55Z

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