dc.contributor.author | Blanco, Victor | |
dc.contributor.author | Canga, Eren | |
dc.contributor.author | Jehoul, Christiane | |
dc.contributor.author | Moussa, Alain | |
dc.contributor.author | Tamaddon, Amir-Hossein | |
dc.contributor.author | Tabery, C. | |
dc.contributor.author | Gunjala, G. | |
dc.contributor.author | Menchtchikov, B. | |
dc.contributor.author | Zacca, V. G. | |
dc.contributor.author | Lalbahadoersing, S. | |
dc.contributor.author | den Boef, A. | |
dc.contributor.author | Synowicky, R. | |
dc.date.accessioned | 2024-03-28T08:31:59Z | |
dc.date.available | 2023-07-28T17:39:55Z | |
dc.date.available | 2024-03-28T08:31:59Z | |
dc.date.issued | 2023 | |
dc.identifier.isbn | 978-1-5106-6099-1 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:001022962000013 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42231.2 | |
dc.source | WOS | |
dc.title | Alignment and overlay through opaque metal layers | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Blanco, Victor | |
dc.contributor.imecauthor | Canga, Eren | |
dc.contributor.imecauthor | Jehoul, Christiane | |
dc.contributor.imecauthor | Moussa, Alain | |
dc.contributor.imecauthor | Tamaddon, Amir-Hossein | |
dc.contributor.orcidimec | Blanco, Victor::0000-0003-4308-0381 | |
dc.contributor.orcidimec | Canga, Eren::0000-0002-2322-8070 | |
dc.contributor.orcidimec | Moussa, Alain::0000-0002-6377-4199 | |
dc.contributor.orcidimec | Tamaddon, Amir-Hossein::0000-0003-4566-0697 | |
dc.identifier.doi | 10.1117/12.2658084 | |
dc.identifier.eisbn | 978-1-5106-6100-4 | |
dc.source.numberofpages | 17 | |
dc.source.peerreview | yes | |
dc.source.beginpage | Art. 124960I | |
dc.source.conference | Conference on Metrology, Inspection, and Process Control XXXVII | |
dc.source.conferencedate | FEB 27-MAR 02, 2023 | |
dc.source.conferencelocation | San Jose | |
dc.source.journal | Proceedings of SPIE | |
dc.source.volume | 12496 | |
imec.availability | Published - imec | |