dc.contributor.author | Zhang, Yiren | |
dc.contributor.author | Umeda, Toru | |
dc.contributor.author | Sakakibara, Hirokazu | |
dc.contributor.author | Ibrahim, Sheik Ansar Usman | |
dc.contributor.author | Sakamoto, Atsushi | |
dc.contributor.author | Singh, Amarnauth | |
dc.contributor.author | Shick, Robert | |
dc.contributor.author | Skjonnemand, Karl | |
dc.contributor.author | Foubert, Philippe | |
dc.contributor.author | Drent, Waut | |
dc.date.accessioned | 2024-03-25T12:57:25Z | |
dc.date.available | 2023-07-28T17:39:57Z | |
dc.date.available | 2024-03-25T12:57:25Z | |
dc.date.issued | 2023 | |
dc.identifier.isbn | 978-1-5106-6103-5 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:001022961000050 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42240.3 | |
dc.source | WOS | |
dc.title | Defectivity reduction in EUV resists through novel high-performance Point-Of-Use (POU) filters | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Drent, Waut | |
dc.identifier.doi | 10.1117/12.2660389 | |
dc.identifier.eisbn | 978-1-5106-6104-2 | |
dc.source.numberofpages | 6 | |
dc.source.peerreview | yes | |
dc.source.conference | Conference on Advances in Patterning Materials and Processes XL | |
dc.source.conferencedate | FEB 27-MAR 01, 2023 | |
dc.source.conferencelocation | San Jose | |
dc.source.journal | N/A | |
dc.source.volume | 12498 | |
imec.availability | Published - imec | |