Authors

Czerwinski, A.; Katcki, J.; Poyai, Amporn; Simoen, Eddy; Claeys, C.; Ratajczak, J.; Gaubas, Eugenijus

Conference

International Conference on Electronic Materials & European Materials Research Society Spring Meeting. Symposium M: Advanced Cha

Title

Statistical analysis of shallow p-n junction leakage increase using XTEM results probabilities

Publication type

Oral presentation