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Statistical analysis of shallow p-n junction leakage increase using XTEM results probabilities
Publication:
Statistical analysis of shallow p-n junction leakage increase using XTEM results probabilities
Date
2000
Presentation
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Czerwinski, A.
;
Katcki, J.
;
Poyai, Amporn
;
Simoen, Eddy
;
Claeys, C.
;
Ratajczak, J.
;
Gaubas, Eugenijus
Journal
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1947
since deposited on 2021-10-14
417
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1947
since deposited on 2021-10-14
417
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations