dc.contributor.author | Montero Alvarez, Daniel | |
dc.contributor.author | Marien, Philippe | |
dc.contributor.author | Hermans, Yannick | |
dc.contributor.author | Vega Gonzalez, Victor | |
dc.contributor.author | Feurprier, Y. | |
dc.contributor.author | Oikawa, N. | |
dc.contributor.author | Buccheri, Nunzio | |
dc.contributor.author | Wu, Chen | |
dc.contributor.author | Martinez Alanis, Gerardo Tadeo | |
dc.contributor.author | Batuk, Dmitry | |
dc.contributor.author | Puliyalil, Harinarayanan | |
dc.contributor.author | Decoster, Stefan | |
dc.contributor.author | Kumar, K. | |
dc.contributor.author | Lazzarino, Frederic | |
dc.contributor.author | Murdoch, Gayle | |
dc.contributor.author | Park, Seongho | |
dc.contributor.author | Tokei, Zsolt | |
dc.date.accessioned | 2024-05-23T11:54:00Z | |
dc.date.available | 2023-08-07T17:07:23Z | |
dc.date.available | 2024-05-23T11:54:00Z | |
dc.date.issued | 2023 | |
dc.identifier.issn | 2380-632X | |
dc.identifier.other | WOS:001027381700031 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42287.2 | |
dc.source | WOS | |
dc.title | Improving uniformity of 3-level High Aspect Ratio Supervias | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Montero Alvarez, Daniel | |
dc.contributor.imecauthor | Marien, Philippe | |
dc.contributor.imecauthor | Hermans, Yannick | |
dc.contributor.imecauthor | Vega Gonzalez, Victor | |
dc.contributor.imecauthor | Buccheri, Nunzio | |
dc.contributor.imecauthor | Wu, Chen | |
dc.contributor.imecauthor | Martinez Alanis, Gerardo Tadeo | |
dc.contributor.imecauthor | Batuk, Dmitry | |
dc.contributor.imecauthor | Puliyalil, Harinarayanan | |
dc.contributor.imecauthor | Decoster, Stefan | |
dc.contributor.imecauthor | Lazzarino, Frederic | |
dc.contributor.imecauthor | Murdoch, Gayle | |
dc.contributor.imecauthor | Park, Seongho | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.orcidimec | Montero Alvarez, Daniel::0000-0001-9966-0399 | |
dc.contributor.orcidimec | Marien, Philippe::0000-0001-5644-4442 | |
dc.contributor.orcidimec | Hermans, Yannick::0000-0002-6973-0795 | |
dc.contributor.orcidimec | Vega Gonzalez, Victor::0000-0002-4320-0585 | |
dc.contributor.orcidimec | Wu, Chen::0000-0002-4636-8842 | |
dc.contributor.orcidimec | Martinez Alanis, Gerardo Tadeo::0000-0001-5036-0491 | |
dc.contributor.orcidimec | Batuk, Dmitry::0000-0002-6384-6690 | |
dc.contributor.orcidimec | Puliyalil, Harinarayanan::0000-0002-9749-5307 | |
dc.contributor.orcidimec | Decoster, Stefan::0000-0003-1162-9288 | |
dc.contributor.orcidimec | Lazzarino, Frederic::0000-0001-7961-9727 | |
dc.contributor.orcidimec | Murdoch, Gayle::0000-0002-6833-220X | |
dc.contributor.orcidimec | Tokei, Zsolt::0000-0003-3545-3424 | |
dc.identifier.doi | 10.1109/IITC/MAM57687.2023.10154787 | |
dc.identifier.eisbn | 979-8-3503-1097-9 | |
dc.source.numberofpages | 3 | |
dc.source.peerreview | yes | |
dc.source.conference | IEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM) | |
dc.source.conferencedate | MAY 22-25, 2023 | |
dc.source.conferencelocation | Dresden | |
dc.source.journal | N/A | |
imec.availability | Published - imec | |