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Calibrated fast thermal calculation and experimental characterization of advanced BEOL stacks
dc.contributor.author | Chang, Xinyue | |
dc.contributor.author | Oprins, Herman | |
dc.contributor.author | Lofrano, Melina | |
dc.contributor.author | Cherman, Vladimir | |
dc.contributor.author | Vermeersch, Bjorn | |
dc.contributor.author | Fortuny, Javier Diaz | |
dc.contributor.author | Park, Seongho | |
dc.contributor.author | Tokei, Zsolt | |
dc.contributor.author | De Wolf, Ingrid | |
dc.date.accessioned | 2023-08-07T17:07:25Z | |
dc.date.available | 2023-08-07T17:07:25Z | |
dc.date.issued | 2023 | |
dc.identifier.issn | 2380-632X | |
dc.identifier.other | WOS:001027381700060 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42294 | |
dc.source | WOS | |
dc.title | Calibrated fast thermal calculation and experimental characterization of advanced BEOL stacks | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Chang, Xinyue | |
dc.contributor.imecauthor | Oprins, Herman | |
dc.contributor.imecauthor | Lofrano, Melina | |
dc.contributor.imecauthor | Cherman, Vladimir | |
dc.contributor.imecauthor | Vermeersch, Bjorn | |
dc.contributor.imecauthor | Fortuny, Javier Diaz | |
dc.contributor.imecauthor | Park, Seongho | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.imecauthor | De Wolf, Ingrid | |
dc.contributor.orcidimec | Chang, Xinyue::0000-0003-1875-6132 | |
dc.contributor.orcidimec | Oprins, Herman::0000-0003-0680-4969 | |
dc.contributor.orcidimec | Cherman, Vladimir::0000-0002-8068-9236 | |
dc.contributor.orcidimec | Vermeersch, Bjorn::0000-0001-8640-672X | |
dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
dc.identifier.doi | 10.1109/IITC/MAM57687.2023.101548 | |
dc.identifier.eisbn | 979-8-3503-1097-9 | |
dc.source.numberofpages | 3 | |
dc.source.peerreview | yes | |
dc.source.conference | IEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM) | |
dc.source.conferencedate | MAY 22-25, 2023 | |
dc.source.conferencelocation | Dresden | |
imec.availability | Under review |
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