dc.contributor.author | Van Dyck, Seppe | |
dc.contributor.author | Aryana, Kiumars | |
dc.contributor.author | Devulder, Wouter | |
dc.contributor.author | Hopkins, Patrick E. | |
dc.contributor.author | Geiregat, Pieter | |
dc.contributor.author | Detavernier, Christophe | |
dc.date.accessioned | 2023-11-29T09:08:16Z | |
dc.date.available | 2023-08-07T17:07:38Z | |
dc.date.available | 2023-11-29T09:08:16Z | |
dc.date.issued | 2023 | |
dc.identifier.issn | 2380-632X | |
dc.identifier.other | WOS:001027381700029 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42297.2 | |
dc.source | WOS | |
dc.title | Changing the Face of Phase Change Memory with Sb2Te3/TiTe2 Superlattices | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Devulder, Wouter | |
dc.contributor.orcidimec | Devulder, Wouter::0000-0002-5156-0177 | |
dc.identifier.doi | 10.1109/IITC/MAM57687.2023.10154782 | |
dc.identifier.eisbn | 979-8-3503-1097-9 | |
dc.source.numberofpages | 3 | |
dc.source.peerreview | yes | |
dc.source.conference | IEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM) | |
dc.source.conferencedate | MAY 22-25, 2023 | |
dc.source.conferencelocation | Dresden | |
dc.source.journal | na | |
imec.availability | Published - imec | |
dc.description.wosFundingText | This research is funded by Flanders Research Foundation (FWO) through a SB PhD Mandate (ID 1S59023N) | |