| dc.contributor.author | Lu, Lu | |
| dc.contributor.author | Jourdan, Nicolas | |
| dc.contributor.author | Daubriac, Richard | |
| dc.contributor.author | Tabata, Toshiyuki | |
| dc.contributor.author | Roze, Fabien | |
| dc.contributor.author | Thuries, Louis | |
| dc.contributor.author | Cristiano, Fuccio | |
| dc.contributor.author | Tokei, Zsolt | |
| dc.date.accessioned | 2023-12-18T11:47:53Z | |
| dc.date.available | 2023-08-07T17:07:38Z | |
| dc.date.available | 2023-12-18T11:47:53Z | |
| dc.date.issued | 2023 | |
| dc.identifier.issn | 2380-632X | |
| dc.identifier.other | WOS:001027381700009 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42298.2 | |
| dc.source | WOS | |
| dc.title | Microsecond UV laser annealing annihilating Ru grains smaller than electron mean free path | |
| dc.type | Proceedings paper | |
| dc.contributor.imecauthor | Jourdan, Nicolas | |
| dc.contributor.imecauthor | Tokei, Zsolt | |
| dc.contributor.orcidimec | Tokei, Zsolt::0000-0003-3545-3424 | |
| dc.contributor.orcidimec | Jourdan, Nicolas::0009-0005-4798-1736 | |
| dc.identifier.doi | 10.1109/IITC/MAM57687.2023.10154669 | |
| dc.identifier.eisbn | 979-8-3503-1097-9 | |
| dc.source.numberofpages | 3 | |
| dc.source.peerreview | yes | |
| dc.source.conference | IEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM) | |
| dc.source.conferencedate | MAY 22-25, 2023 | |
| dc.source.conferencelocation | Dresden | |
| dc.source.journal | na | |
| imec.availability | Published - imec | |
| dc.description.wosFundingText | This project has received funding from the ECSEL Joint Undertaking (JU) under grant agreement No 875999. The JU receives support from the European Union's Horizon 2020 research and innovation programme and Netherlands, Belgium, Germany, France, Austria, Hungary, United Kingdom, Romania, Israel. The project has also received funding from the French PSPC project IT2-FR. | |
