Investigating the Metal-plasma Interaction during the Patterning of MgZnO Alloys, used For Compute and Memory Applications

Publication:

2023-10

Meeting abstract

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ECS Meeting Abstracts, Volume MA2023-02,

111 since deposited on 2023-08-23

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Acq. date: 2026-02-26

263 since deposited on 2023-08-23

Acq. date: 2026-02-26