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Investigating the Metal-plasma Interaction during the Patterning of MgZnO Alloys, used For Compute and Memory Applications
Publication:
Investigating the Metal-plasma Interaction during the Patterning of MgZnO Alloys, used For Compute and Memory Applications
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Date
2023
Meeting abstract
https://doi.org/10.1149/ma2023-02161164mtgabs
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ghorbani, Leila
;
Kundu, Shreya
;
Lazzarino, Frederic
;
De Gendt, Stefan
Journal
ECS Meeting Abstracts, Volume MA2023-02,
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Downloads
231
since deposited on 2023-08-23
14
last month
Acq. date: 2026-08-30
Views
268
since deposited on 2023-08-23
2
last month
Acq. date: 2026-08-30
Citations