dc.contributor.author | Hadid, Jawad | |
dc.contributor.author | Rodrigues, Matias | |
dc.contributor.author | Harouri, Abdelmounaim | |
dc.contributor.author | Dupuis, Christophe | |
dc.contributor.author | Bouville, David | |
dc.contributor.author | Martin, Antoine | |
dc.contributor.author | Loidl, Martin | |
dc.contributor.author | Ferlazzo, Laurence | |
dc.date.accessioned | 2023-11-30T11:36:39Z | |
dc.date.available | 2023-08-26T17:25:37Z | |
dc.date.available | 2023-08-30T09:39:32Z | |
dc.date.available | 2023-11-30T11:36:39Z | |
dc.date.issued | 2023 | |
dc.identifier.issn | 2590-0072 | |
dc.identifier.other | WOS:001047467700001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42397.3 | |
dc.source | WOS | |
dc.title | Detachable three-layer Au absorber microfabrication for low-temperature detectors | |
dc.type | Journal article | |
dc.contributor.imecauthor | Hadid, Jawad | |
dc.contributor.orcidimec | Hadid, Jawad::0000-0003-1036-2550 | |
dc.date.embargo | 2023-05-10 | |
dc.identifier.doi | 10.1016/j.mne.2023.100220 | |
dc.source.numberofpages | 8 | |
dc.source.peerreview | yes | |
dc.source.beginpage | Art. 100220 | |
dc.source.endpage | 8 | |
dc.source.journal | MICRO AND NANO ENGINEERING | |
dc.source.issue | na | |
dc.source.volume | 20 | |
imec.availability | Published - open access | |
dc.description.wosFundingText | This work is part of the project 20FUN04 PrimA-LTD that has received funding from the EMPIR programme co-financed by the & nbsp;Participating States and from the European Union's Horizon 2020 research and innovation programme. This work was done within the C2N micro nanotechnologies platforms and was partly supported by the RENATECH network and the General Council of Essonne. The authors thank Laetitia Leroy for PVD deposition, Sebastian Kempf and Joern Beyer for fruitful discussion in the choice of Au electrolyte. | |