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Detachable three-layer Au absorber microfabrication for low-temperature detectors
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Authors
Hadid, Jawad
;
Rodrigues, Matias
;
Harouri, Abdelmounaim
;
Dupuis, Christophe
;
Bouville, David
;
Martin, Antoine
;
Loidl, Martin
;
Ferlazzo, Laurence
DOI
10.1016/j.mne.2023.100220
ISSN
2590-0072
Issue
na
Journal
MICRO AND NANO ENGINEERING
Volume
20
Title
Detachable three-layer Au absorber microfabrication for low-temperature detectors
Publication type
Journal article
Embargo date
2023-05-10
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Date
Summary
3
20.500.12860/42397.3
*
2023-11-30T11:34:22Z
validation by library/open access desk
2
20.500.12860/42397.2
2023-08-30T09:05:00Z
validation by imec author
1
20.500.12860/42397
2023-08-26T17:25:37Z
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