3D backside integration of FinFETs: Is there an impact on LF noise?
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Jourdain, Anne | |
| dc.contributor.author | Claeys, Cor | |
| dc.contributor.author | Veloso, Anabela | |
| dc.date.accessioned | 2024-01-30T10:29:25Z | |
| dc.date.available | 2023-09-10T17:26:46Z | |
| dc.date.available | 2024-01-30T10:29:25Z | |
| dc.date.issued | 2023 | |
| dc.identifier.issn | 0038-1101 | |
| dc.identifier.other | WOS:001058355700001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42513.3 | |
| dc.source | WOS | |
| dc.title | 3D backside integration of FinFETs: Is there an impact on LF noise? | |
| dc.type | Journal article | |
| dc.contributor.imecauthor | Jourdain, Anne | |
| dc.contributor.imecauthor | Veloso, Anabela | |
| dc.contributor.orcidimec | Jourdain, Anne::0000-0002-7610-0513 | |
| dc.identifier.doi | 10.1016/j.sse.2023.108724 | |
| dc.source.numberofpages | 4 | |
| dc.source.peerreview | yes | |
| dc.source.beginpage | Art. 108724 | |
| dc.source.endpage | N/A | |
| dc.source.journal | SOLID-STATE ELECTRONICS | |
| dc.source.issue | September | |
| dc.source.volume | 207 | |
| imec.availability | Published - imec |
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