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Extension of a multilayer interconnection technology in MCM-Si with opto-electronic facilities

dc.contributor.authorDe Pauw, Herbert
dc.contributor.authorDe Smet, Herbert
dc.contributor.authorVanfleteren, Jan
dc.contributor.authorLernout, Jo
dc.contributor.authorVan Calster, Andre
dc.date.accessioned2021-10-14T12:49:14Z
dc.date.available2021-10-14T12:49:14Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4270
dc.sourceIIOimport
dc.titleExtension of a multilayer interconnection technology in MCM-Si with opto-electronic facilities
dc.typeJournal article
dc.contributor.imecauthorDe Pauw, Herbert
dc.contributor.imecauthorDe Smet, Herbert
dc.contributor.imecauthorVanfleteren, Jan
dc.contributor.imecauthorVan Calster, Andre
dc.contributor.orcidimecVanfleteren, Jan::0000-0002-9654-7304
dc.source.peerreviewno
dc.source.beginpage163
dc.source.endpage170
dc.source.journalMicroelectronics Reliability
dc.source.issue1
dc.source.volume40
imec.availabilityPublished - imec


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