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Simulations and measurements of capacitance in dielectric stacks and consequences for integration

dc.contributor.authorDe Roest, David
dc.contributor.authorDonaton, R. A.
dc.contributor.authorStucchi, Michele
dc.contributor.authorMaex, Karen
dc.contributor.authorNauwelaers, Bart
dc.date.accessioned2021-10-14T12:49:23Z
dc.date.available2021-10-14T12:49:23Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4272
dc.sourceIIOimport
dc.titleSimulations and measurements of capacitance in dielectric stacks and consequences for integration
dc.typeOral presentation
dc.contributor.imecauthorDe Roest, David
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorMaex, Karen
dc.contributor.imecauthorNauwelaers, Bart
dc.source.peerreviewno
dc.source.conferenceMaterials for Advanced Metallization Conference - MAM; February 28 - March 1, 2000; Stresa, Italy.
dc.source.conferencelocation
imec.availabilityPublished - imec


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