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Analytical characterization of new high k dielectric stacks

dc.contributor.authorDe Witte, Hilde
dc.contributor.authorConard, Thierry
dc.contributor.authorBender, Hugo
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-14T12:50:19Z
dc.date.available2021-10-14T12:50:19Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4284
dc.sourceIIOimport
dc.titleAnalytical characterization of new high k dielectric stacks
dc.typeOral presentation
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.conferenceQuantitative Surface Analysis-11; 3-7 July 2000; Surrey, UK.
dc.source.conferencelocation
imec.availabilityPublished - imec


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