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Influence of oxygen on the analysis of oxynitrides: N-diffusion or ionization?

dc.contributor.authorDe Witte, Hilde
dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-14T12:50:28Z
dc.date.available2021-10-14T12:50:28Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4286
dc.sourceIIOimport
dc.titleInfluence of oxygen on the analysis of oxynitrides: N-diffusion or ionization?
dc.typeOral presentation
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.conferenceSIMS Workshop
dc.source.conferencedate1/05/2000
dc.source.conferencelocationLake Tahoe, CA USA
imec.availabilityPublished - imec


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