Authors

De Witte, Hilde; Conard, Thierry; Vandervorst, Wilfried; Gijbels, Renaat

Conference

Secondary Ion Mass Spectrometry - SIMS XII. Proceedings of the 12th International Conference

Title

Study of oxynitrides with dual beam TOF-SIMS

Publication type

Proceedings paper

Embargo date

9999-12-31