dc.contributor.author | Li, Yingying | |
dc.contributor.author | Worsey, Elliott | |
dc.contributor.author | Bleiker, Simon J. | |
dc.contributor.author | Edinger, Pierre | |
dc.contributor.author | Kulsreshath, Mukesh Kumar | |
dc.contributor.author | Tang, Qi | |
dc.contributor.author | Takabayashi, Alain Yuji | |
dc.contributor.author | Quack, Niels | |
dc.contributor.author | Verheyen, Peter | |
dc.contributor.author | Bogaerts, Wim | |
dc.contributor.author | Gylfason, Kristinn B. | |
dc.contributor.author | Pamunuwa, Dinesh | |
dc.contributor.author | Niklaus, Frank | |
dc.date.accessioned | 2023-12-14T12:44:33Z | |
dc.date.available | 2023-11-02T17:41:36Z | |
dc.date.available | 2023-12-14T12:44:33Z | |
dc.date.issued | 2023 | |
dc.identifier.issn | 2040-3364 | |
dc.identifier.other | WOS:001085474400001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/43063.2 | |
dc.source | WOS | |
dc.title | Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process | |
dc.type | Journal article | |
dc.contributor.imecauthor | Verheyen, Peter | |
dc.contributor.imecauthor | Bogaerts, Wim | |
dc.contributor.orcidimec | Verheyen, Peter::0000-0002-8245-9442 | |
dc.contributor.orcidimec | Bogaerts, Wim::0000-0003-1112-8950 | |
dc.date.embargo | 2023-10-31 | |
dc.identifier.doi | 10.1039/d3nr03429a | |
dc.source.numberofpages | 7 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 17335 | |
dc.source.endpage | 17341 | |
dc.source.journal | NANOSCALE | |
dc.identifier.pmid | MEDLINE:37856244 | |
dc.source.issue | 43 | |
dc.source.volume | 15 | |
imec.availability | Published - open access | |
dc.description.wosFundingText | Support from the European Union & apos;s Horizon 2020 research and innovation program under grant agreement No. 780283 (MORPHIC) and No. 871740 (ZeroAMP) is gratefully acknowledged. The authors acknowledge the support of the EPFL Center of MicroNanoTechnology (CMi) for process steps performed at EPFL. | |