Publication:

Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process

Date

2023
Journal article
https://doi.org/10.1039/d3nr03429a
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

PrimaryPublished version 1.34 MB
CC-BY
CC-BY - Attribution
Correction to the article 144.93 KB
CC-BY
CC-BY - Attribution

Author(s)

Li, Yingying
;
Worsey, Elliott
;
Bleiker, Simon J.
;
Edinger, Pierre
;
Kulsreshath, Mukesh Kumar
;
Tang, Qi
;
Takabayashi, Alain Yuji
;
Quack, Niels
;
Verheyen, Peter  
;
Bogaerts, Wim  
;
Gylfason, Kristinn B.
;
Pamunuwa, Dinesh
;
Niklaus, Frank

Journal

NANOSCALE

Abstract

Description

Statistics

Downloads

454 since deposited on 2023-11-02
72last month
5last week
Acq. date: 2026-08-29

Views

1002 since deposited on 2023-11-02
1last month
Acq. date: 2026-08-29

Citations

Statistics

Downloads

454 since deposited on 2023-11-02
72last month
5last week
Acq. date: 2026-08-29

Views

1002 since deposited on 2023-11-02
1last month
Acq. date: 2026-08-29

Citations