Publication:

Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process

Date

2023
Journal article
https://doi.org/10.1039/d3nr03429a
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Author(s)

Li, Yingying
;
Worsey, Elliott
;
Bleiker, Simon J.
;
Edinger, Pierre
;
Kulsreshath, Mukesh Kumar
;
Tang, Qi
;
Takabayashi, Alain Yuji
;
Quack, Niels
;
Verheyen, Peter  
;
Bogaerts, Wim  
;
Gylfason, Kristinn B.
;
Pamunuwa, Dinesh
;
Niklaus, Frank

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NANOSCALE

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490 since deposited on 2023-11-02
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1002 since deposited on 2023-11-02
Acq. date: 2026-09-21

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