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Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process
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Authors
Li, Yingying
;
Worsey, Elliott
;
Bleiker, Simon J.
;
Edinger, Pierre
;
Kulsreshath, Mukesh Kumar
;
Tang, Qi
;
Takabayashi, Alain Yuji
;
Quack, Niels
;
Verheyen, Peter
;
Bogaerts, Wim
;
Gylfason, Kristinn B.
;
Pamunuwa, Dinesh
;
Niklaus, Frank
DOI
10.1039/d3nr03429a
ISSN
2040-3364
PMID
MEDLINE:37856244
Issue
43
Journal
NANOSCALE
Volume
15
Title
Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process
Publication type
Journal article
Embargo date
2023-10-31
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2
20.500.12860/43063.2
*
2023-12-14T12:41:54Z
validation by library/open access desk
1
20.500.12860/43063
2023-11-02T17:41:36Z
*Selected version
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