Synthesis of CoxFe1-xSi2 with High-Dose Ion Implantation and Reactive Codeposition Epitaxy

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Authors
Vantomme, Andre; Wu, Ming Fang; Degroote, S.; Dekoster, J.; Langouche, G.; Tavares, J.; Bender, Hugo
Conference
10th Conference on Ion Implantation Technology
Title
Synthesis of CoxFe1-xSi2 with High-Dose Ion Implantation and Reactive Codeposition Epitaxy
Publication type
Oral presentation
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