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Nondestructive characterization of thin silicides using x-ray reflectivity

dc.contributor.authorDetavernier, C.
dc.contributor.authorDe Gryse, R.
dc.contributor.authorVan Meirhaeghe, R. L.
dc.contributor.authorCardon, F.
dc.contributor.authorRu, Guo-Ping
dc.contributor.authorQu, Xin-Ping
dc.contributor.authorLi, Bing-Zong
dc.contributor.authorAlves Donaton, Ricardo
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T12:54:23Z
dc.date.available2021-10-14T12:54:23Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4334
dc.sourceIIOimport
dc.titleNondestructive characterization of thin silicides using x-ray reflectivity
dc.typeJournal article
dc.contributor.imecauthorMaex, Karen
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage470
dc.source.endpage476
dc.source.journalJ. Vacuum Science and Technology A
dc.source.issue2
dc.source.volumeA18
imec.availabilityPublished - open access


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