Nondestructive characterization of thin silicides using x-ray reflectivity

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Authors

Detavernier, C.; De Gryse, R.; Van Meirhaeghe, R. L.; Cardon, F.; Ru, Guo-Ping; Qu, Xin-Ping; Li, Bing-Zong; Alves Donaton, Ricardo; Maex, Karen

Issue

2

Journal

J. Vacuum Science and Technology A

Volume

A18

Title

Nondestructive characterization of thin silicides using x-ray reflectivity

Publication type

Journal article

Embargo date

9999-12-31

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