Publication:

Nondestructive characterization of thin silicides using x-ray reflectivity

Date

2000

Journal article

Simple item page Full metadata Statistics

Files

4318.pdf 461.82 KB

Author(s)

Detavernier, C.

;

;

Van Meirhaeghe, R. L.

;

;

;

;

;

Alves Donaton, Ricardo

;

Journal

J. Vacuum Science and Technology A

Statistics

1950 since deposited on 2021-10-14

1last month

Acq. date: 2026-05-17